Sputter Coater

The model EffaCoater from E. F. Fullam Inc. is a sputter coater designed for coating non-conductive specimens for SEM analysis. It has an integrated solid-state timer for repeatable coatings and inert gas bleed fittings to prevent oxidative breakdown diring the coating process. Targets are available with magnetic field deflection to prevent sample heat damage.

Specifications

  • Operating Vacuum: 200-300 mm Hg.
  • Operating Current: Up to 200 mA-High Rate
  • Pumping Time: 20-60 seconds (dependent on pump capacity)
  • Target Life: High Rate-1-2 years, depending on usage

Sputter Coater

Available Targets

  • Gold
  • Palladium
  • Gold (40%)-Palladium (60%)
  • Platinum
  • Aluminum
  • Silver
  • Chromium
  • Nickel
  • Copper
  • Molybdenum

The system also includes a Cressington MTM10 thickness monitor. The monitor is based on the principle that the oscillating frequency of a quartz crystal is changed by the mass of a deposited film on its upper face.

Specifications

  • Microprocessor based, 4-digit display, push-button zero
  • 60 MHz crystal with lifetime check with a 5 second update rate
  • Thickness range : 0.0 – ±999.9 nm
  • Resolution: 0.1 nm gold
  • Density range: 0.50 – 30.00 g/cm3
  • Tool factor range: 0.25 – 8.0